Diaphragm Lamination
Injecting compressed air into rubber balloon(Diaphragm) and its expansion presses material. Its pressure is mild and good at handling fragile materials(e.g. wafer). It is also good at laminating thin films on fine and narrow patterns.

 

Rubber Press Lamination
Rubber Press Lamination is powered by hydraulic power.
The high-power rubber press laminator is good at laminating rigid resin into fine Patterns.

 

Flattening Stage
Lamination is not enough to achieve enough planarity requirement.
On CVP series, we have flattening stage. It flattens material with specular-finished SUS Plate.

 

Automated Line/Carrier Film Conveyance System
In CV-series, substrate will be carried by Carrier Film conveyance system.Together with Pre-tacking Machine NT, it can fully automate lamination process.